Ion Implantation

A silicon MBE-compatible low-energy ion implanter

Geochemistry / Ion Implantation / Interdisciplinary Engineering

A silicon MBE-compatible low-energy ion implanter

Geochemistry / Ion Implantation / Interdisciplinary Engineering

Low-resistance self-aligned Ti-silicide technology for sub-quarter micron CMOS devices

Feature Selection / Ion Implantation / Electrical And Electronic Engineering

A Comparison of Transient Boron Diffusion in Silicon, Silicon Carbide and Diamond

Microelectronics And Semiconductor Engineering / Semiconductor Physics / Silicon / Diffusion / Silicon Carbide / Ion Implantation / Diamond / Electronics Engineering / Ion Implantation / Diamond / Electronics Engineering

Fabrication of nanocrystal memories by ultra low energy ion implantation

Materials Engineering / Condensed Matter Physics / Quantum Physics / Ion Implantation

Polymer processing by a low energy ion accelerator

Geochemistry / Laser produced plasma / Contact angle / Polyethylene / Ion Implantation / Surface Properties / Interdisciplinary Engineering / Laser Ion Source / Power Density / Surface Properties / Interdisciplinary Engineering / Laser Ion Source / Power Density

Structural and magnetic properties of Fe–Al silica composites prepared by sequential ion implantation

Geochemistry / Silica / Magnetic Properties / Ion Implantation / Temperature Dependence / Lattice Parameter / Interdisciplinary Engineering / Lattice Parameter / Interdisciplinary Engineering

Fabrication of nanocrystal memories by ultra low energy ion implantation

Materials Engineering / Condensed Matter Physics / Quantum Physics / Ion Implantation

Scanning ion deep level transient spectroscopy

Engineering / Geochemistry / Spatial Analysis / Si / Physical sciences / OR / Activation Energy / Ion Implantation / System Development / Schottky Barrier / Theoretical Framework / Interdisciplinary Engineering / Transient Response / Spectroscopic Techniques / Ion Beams / Schottky barriers / OR / Activation Energy / Ion Implantation / System Development / Schottky Barrier / Theoretical Framework / Interdisciplinary Engineering / Transient Response / Spectroscopic Techniques / Ion Beams / Schottky barriers

Mobile silicon di-interstitial: Surface, self-interstitial clustering, and transient enhanced diffusion phenomena

Physical sciences / Ion Implantation / CHEMICAL SCIENCES

Transient enhanced diffusion of implanted boron in 4H-silicon carbide

Engineering / Silicon Carbide / Physical sciences / Band Gap / Ion Implantation

Comparison between cathodoluminescence spectroscopy and capacitance transient spectroscopy on Al+ ion implanted 4H-SiC p+/n diodes

Condensed Matter Physics / Silicon Carbide / Ion Implantation

Silicon nanocrystal memory devices obtained by ultra-low-energy ion-beam synthesis

Solid State electronics / Ion Implantation / Non-Volatile Memory Technologies / Solid State / Ion Beam / Electrical And Electronic Engineering

Fabrication of nanocrystal memories by ultra low energy ion implantation

Materials Engineering / Condensed Matter Physics / Quantum Physics / Ion Implantation

Paramagnetism in Mn/Fe implanted ZnO

Engineering / Applied Physics / Magnetic field / Physical sciences / Band Gap / Zinc / Iron / Ion Implantation / Room Temperature / Single Crystal / Gamma-ray Spectroscopy / Zinc / Iron / Ion Implantation / Room Temperature / Single Crystal / Gamma-ray Spectroscopy

Mobile silicon di-interstitial: Surface, self-interstitial clustering, and transient enhanced diffusion phenomena

Physical sciences / Ion Implantation / CHEMICAL SCIENCES

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